EPR Spectroscopy of Diazoquinone–Novolac Resist Films Implanted with P+ and B+ Ions
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: High Energy Chemistry
سال: 2020
ISSN: 0018-1439,1608-3148
DOI: 10.1134/s0018143920020046